Semiconductor Applications

HS carbon high-purity graphite components are crucial to processes in the semiconductor industry that are suitable for use in a high-temperature and dust-free environment, we offer high-precision graphite components for wafer processing equipment, such as susceptors for Epitaxy or MOCVD.


Monocrystalline silicon-向尚碳精

Monocrystalline silicon

High purity graphite for Ion implant-向尚碳精

High purity graphite for Ion implant

MOCVD Susceptor-向尚碳精

MOCVD Susceptor

MOCVD cyclone ring-向尚碳精

MOCVD cyclone ring

MOCVD components-向尚碳精

MOCVD components

Graphite fixture-向尚碳精

Graphite fixture

Proerty values R-6340 R-6500 R-6510 R-6650
Density g/cm3 1.72 1.77 1.83 1.84
Porosity(Open) % 15 14 10 10
Grain Size μm
15 10 10 7
Hradness Rockwell B 5/100 HRB
80 70 90 95
Young's mouldus Mpa 11000 10500 11500 12500
Flexural Strength Mpa
40 45 60 65
Compressive Strength Mpa
85 90 130 150
Specific electrical resistance
µΩm 16 12 13 14
Thermal expension x10-6K-1 3.2 4.2 4.2 4.1
Thermal conductivity
Wm-1K-1 105 90 105 95
Ash Value
ppm 100 100 100 100